Stresses in Thin-Films
Stresses in thin films can result in delamination, defect generation, and changes in optical and thermophysical properties. Thin films of semiconductors, metals, insulators,and polymers are currently used in numerous applications such as microelectronic interlayers, computer chip packaging, rapid prototyping, and optical coatings. TAMPL Research in this area involves measuring strains in multilayer structures at high temperatures. A prototype, the High-Operating-Temperature Measurement Apparatus for Strain and Curvature (HOT-MASC), has been built to measure curvatures in-situ with split laser beams reflected from a smooth multilayer surface.
Contact: Peter Y. Wong
