Service Center: Tufts Micro/Nano-Fab (TMNF)

Purpose: Research and teaching in MEMS and Micro/Nano-scale devices including Bio-MEMS

Major Instruments/Services: NUV Contact Lithography, Wet Chemistry, DC Sputter Deposition, Plasma Etching, Packaging, and Metrology

Fee: Yes

Access: Open to Tufts community

Preferred Contact: Robert White, r.white@tufts.edu, (617) 627-2210

Campus: Medford

Website: http://engineering.tufts.edu/microfab

Level of Service:

• Level 3: Do-it-yourself after intensive supervised training. Occasional trouble-shooting help is provided.

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