Photograph of Robert White in the Tufts Microfabrication Facility in front of a OAI Model 204 manual aligner.

ATL 2850 (200 Boston Ave)

Tufts Microfab

Home

Tufts Micro/Nano Fab:

Thin film deposition, photolithography, etching, packaging and metrology for MEMS and NEMS. See the TMNF website for more details.

Laboratory capabilities at ATL 2850:

Measurement of sound and vibration. The lab has a good selection of accelerometers and microphones, an electrodynamic shaker, impact hammer, speakers, and data acquisition abilities.

Microscale Laser Doppler Velocimetry system (LDV) for vibration measurements with sub-angstrom resolution at frequencies from 10 Hz-20 MHz and spot size of less than 20 microns. The system is capable of single point transient scans, two dimensional spatially distributed steady state vibration scans, and two dimensional spatially distributed transient scans.

The lab is also equipped with microscopes, micropositioners and probes, and a variety of electrical test equipment. We also conduct basic mechanical and electrical fabrication (test fixturing and PC boards).

Return to top level page.