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2009

Patents

R. White, A. Mueller, C. Rogers, V. Manno, D. Gauthier, and H. Stone U.S. Patent: "Shear Sensors and the Uses Thereof", Serial Number PCT/US2009/039415 filed 4/3/09. Claims the benefit of U.S. provisional application Serial No. 61/042,132 filed April 3, 2008.

R. White and J. Krause, U.S. Patent: "MEMS Microphone Array on a Chip", Serial Number PCT/US2009/045289 ,filed May 27, 2009. Claims the benefit of U.S. provisional application Serial Number 61/056,291 filed 5/27/08.

Journal Articles

Vlahakis, J., Rogers, C., Manno, V., White, R., Moinpur, M., Hooper, D., and Anjur, S., "Synchronous, In Situ Measurements in Chemical Mechanical Planarization", Journal of the Electrochemical Society, 156 (10), H794-H802, 2009. PDF of the paper.

Mueller, N., Rogers, C. Manno, V., White, R. and Moinpour, M., "In-Situ Investigation of Slurry Flow Fields during CMP", Journal of the Electrochemical Society, 156 (12), H908-H912, 2009. PDF of the paper.

Amsden, J., Domachuk,,P., Gopinath, A., White, R.D., Dal Negro, L., Kaplan, D. and Omenetto, F. "Rapid Nanoimprinting of Silk Fibroin Films for Biophotonic Applications", Advanced Materials, accepted manuscript, article in press.

Saunders, F., Golden, E., White, R., and Rife, J., "Experimental Verification of Soft-Robot Gaits Evolved Using a Lumped Dynamic Model" submitted to Robotica, August 7, 2009 (under review).

Doody, C., Lemmerhirt, D., Cheng, X., Collin, R., White, R. D. "Modeling and Characterization of CMOS-Fabricated Capacitive Micromachined Ultrasonic Transducers", submitted to the Journal of Microelectromechanical Systems, September 21, 2009 (under review).

Conference Papers

Krause, J., White, R., Moeller, M., and deJong R., "MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer" in the Proceedings of the AIAA, AIAA Infotech, Seattle, WA, April 6-9, 2009. PDF of the paper.

2008

Patents

R. White and J. Krause, U.S. Provisional Patent: "MEMS Microphone Array on a Chip", Serial Number 61/056,291 filed 5/27/08.

R. White, A. Mueller, C. Rogers, V. Manno, and D. Gauthier, U.S. Provisional Patent: "Shear Sensors and the Uses Thereof", Serial Number 61/042,132 filed 4/3/08.

Journal Articles

Cheng, L., White, R. D., and Grosh, K. "Three Dimensional Viscous Finite Element Formulation For Acoustic Fluid Structure Interaction" Computer Methods in Applied Mechanics and Engineering, 197, pp. 4160-4172, 2008. PDF of the paper.

Galbraith, C. ,White, R. D., Cheng, L., Grosh, K. and Rebeiz, G. M. "Cochlea-Based RF Channelizing Filters", IEEE Transactions on Circuits and Systems I: Regular Papers, 55 (4), pp. 969-979, 2008. PDF of the paper.

Liu, S., and White. R. D. "Orthotropic material properties of the gerbil basilar membrane", Journal of the Acoustical Society of America, 123 (4), pp. 2160-2171, 2008. PDF of the paper.

Gray, C., White, R. D., Manno, V. P., and Rogers, C. B. "Contact Measurements between Rough and Smooth Surfaces", Tribology Letters, 29 (3), pp. 185-192, 2008. PDF of the paper.

White, R. D., Cheng, L., and Grosh, K. "Microfabrication of Coupled Fluid-Structure Systems with Applications in Acoustic Sensing", Sensors and Actuators A-Physical, 141 (2), 2008, pp. 288-298. PDF of the paper.

Conference Papers

Thompson, J., Tepolt, G. Racz, L., Rogers, C. B., Manno, V. P., and White, R. D. "A Method for Die Thickness Reduction to sub-35 5m" in the Proceedings of the Materials Research Society, MRS Fall Meeting, December 2008.

White, R., Vlahakis, J., Gray, C., Manno, V., Braun, N., Gauthier, D., Mueller, A., Rogers, C. and Moinpour, M. "In Situ Characterization of the Mechanical Aspects of CMP" in the Proceedings of the International Conference on Planarization/CMP Technology 2008, Hsinchu, Taiwan, November 10-12, 2008. PDF of the paper.

C.B. Doody, R. D. White, J.S. Wadhwa, and D.F. Lemmerhirt, "Characterization and Modeling of Capacitive Micromachined Ultrasound Transducers for Diagnostic Ultrasound" in Proceedings of the ASME IMECE, Boston, MA, October 31-November 6, 2008. PDF of the paper.

J. S. Krause, R. D. White, M. J. Moeller, J. M. Gallman, and R. deJong, "MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer" in Proceedings of the ASME IMECE, Boston, MA, October 31-November 6, 2008. PDF of the paper.

S. Liu, D. A. Gauthier, E. Mandelup, and R. D. White, "Experimental Investigation of a Hydromechanical Scale Model of the Gerbil Cochlea" in Proceedings of the ASME IMECE, Boston, MA, October 31-November 6, 2008. PDF of the paper.

D. Gauthier, A. Mueller, R. White, V. Manno, C. Rogers, S. Anjur and M. Moinpour, "Micromachined Force Sensors for Characterization of Chemical Mechanical Polishing" in Proceedings of Nanotech 2008, Boston, MA, June 1-6, 2008. PDF of the paper.

J.S. Krause, R.D White, M.J. Moeller, J.M. Gallman and R. De Jong, "MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage" in Proceedings of Nanotech 2008, Boston, MA, June 1-6, 2008. PDF of the paper.

P. D. Fallon, A.P. Gerratt, B.P. Kierstead, and R.D. White, "Shape Memory Alloy and Elastomer Composite MEMS Actuators" in Proceedings of Nanotech 2008, Boston, MA, June 1-6, 2008. PDF of the paper.

Meghan Kate, Greg Bettencourt, James Marquis, Aaron Gerratt, Peter Fallon, Brian Kierstead, Robert White and Barry Trimmer, "SoftBot : A soft-material flexible robot based on caterpillar biomechanics" in Adaptive Movement in Animals and Machines, AMAM 2008, Cleveland, OH, June 1-6, 2008. PDF of the paper.

C.B. Doody, J.S. Wadhwa, D.F. Lemmerhirt, and R.D White, "Characterization and Modeling of Capacitive Micromachined Ultrasound Transducers for Diagnostic Ultrasound" in Proceedings of Nanotech 2008, Boston, MA, June 1-6, 2008. PDF of the paper.

Hughes, M.F., Sanayei, M., Moore, J.A., Zapfe, J.A., and White, R.D., "Experimental Validation of Building Vibration Propagation Using a Four Story Laboratory Model," in the Proceedings of the ASCE, Structures Congress 2008, Vancouver, Canada, April 24-26, 2008. PDF of the paper.

D. Gauthier, A. Mueller, R. D. White, V. Manno, C. Rogers, D. Hooper, S. Anjur, M. Moinpour, "Micromachined Lateral Force Sensors for Characterization of Microscale Surface Forces During Chemical Mechanical Polishing." in the Proceedings of the Materials Research Society, MRS Spring Meeting, March 24-28, 2008. PDF of the paper.

2007

Patents

R. White and K. Grosh, U.S. Patent Pending: "Trapped Fluid Microsystems For Acoustic Sensing", Serial No. 11/656,849 filed January 23,2007. Claims the benefit of U.S. provisional application Serial No. 60/761,166 filed January 23, 2006.

Journal Articles

Martin, M. J., White, R. D., Kurabayashi, K., and Boyd, I. D., "Fabrication of beam structures with micro-scale cross-sections and meso-scale spans," Journal of Micromechanics and Microengineering, 17 (12), pp. 2516-2521, 2007. PDF of the paper.

Conference Papers

N. Braun, C. Gray, A. Mueller, J. Vlahakis, D. Gauthier, V. P. Manno, C. Rogers, R. White, S. Anjur, M. Moinpour. "In-Situ Investigation of Wafer-Slurry-Pad Interactions during CMP" in the Proceedings of the International Conference on Planarization/CMP Technology, Dresden, Germany, October 25-27, 2007. PDF of the paper.

Tsioris, K., White, R. D., Kaplan, D., and Wong, P. "The Effect of Hydrophobic Patterning on Micromolding of Aqueous-Derived Silk Structures" in the Proceedings of the Material Research Society, MRS Fall Meeting, November 26-30, 2007. PDF of the paper.

White, R. D., Littrell, R., and Grosh, K. "Copying the Cochlea: Micromachined Biomimetic Acoustic Sensors" 6th International Workshop on Structural Health Monitoring, September 11-13, 2007, Palo Alto, CA. PDF of the paper.

Mueller, A. White, R. D., Manno, V., Rogers, C., Barns, C. E., Anjur, S., and Moinpour, M. "Micromachined Shear Stress Sensors for Characterization of Surface Forces During Chemical Mechanical Polishing" in Proceedings of the Materials Research Society, Vol. 991, Symposium C, Advances and Challenges in Chemical Mechanical Planarization, 2007. PDF of the paper.

Gray, C., Rogers, C. Manno, V., White, R., Moinpour, M., Anjur S. "Determining Pad-Wafer Contact using Dual Emission Laser Induced Fluorescence", in Proceedings of the Materials Research Society, Vol. 991, Symposium C, Advances and Challenges in Chemical Mechanical Planarization, 2007. PDF of the paper.

2006

Stone, N., Kaiser, K., and White, R. D. "Autotuning of a PID controller for an active vibration suppression device for the treatment of Essential Tremor", Proceedings of the 2006 American Society of Mechanical Engineering International Mechanical Engineering Congress and Exposition, IMECE2006. PDF of the paper.

Mueller, A., and White, R. D. "Residual stress variation in polysilicon thin films", in Proceedings of the 2006 American Society of Mechanical Engineering International Mechanical Engineering Congress and Exposition, IMECE2006. PDF of the paper.

White, R. D. and Grosh, K. "Fully Micromachined Lifesize Cochlear Model" in Auditory Mechanisms: Processes and Models, A. L. Nuttall, ed., World Scientific, 2006. PDF of the paper.

2005 and before

White, R. D. and Grosh, K. "Trapped-Fluid Traveling Wave Filters Based on the Mammalian Cochlea" in Proceedings of the uTAS 2005 Conference, Ninth International Conference on Miniaturized Systems for Chemistry and Life Science, K. F. Jensen, J. Han, D. J. Harrison, and J. Voldman, Eds., pp. 666-668. PDF of the paper.

Galbraith, C., White, R. D., Grosh, K., and Rebeiz, G. M. "A mammalian cochlea-based RF channelizer filter" in Microwave Symposium Digest, 2005 IEEE MTT-S International, 12-17 June 2005 pp. 1935-1938. PDF of the paper.

White, R. D., and Grosh, K. "Microengineered hydromechanical cochlear model" Proceedings of the National Academy of Sciences 102 (5), pp. 1296-1301. PDF of the paper.

White, R. D., Cheng, L., and Grosh, K. "Capacitively sensed micromachined hydrophone with viscous fluid-structure coupling", Proceedings of the SPIE, Photonics West: MOEMS-MEMS Micro & Nanofabrication San Jose, vol. 5718, 121 (2005) pp. 121-132. PDF of the paper.

White, R. D. and Grosh, K. "A micromachined cochlear-like acoustic sensor", in Proceedings of the SPIE, vol. 4700, 2002 pp. 89-100. PDF of the paper. (680 kB PDF)

White, R. D. and Grosh, K. "Design and characterization of a MEMS piezoresistive cochlear-like acoustics sensor", in Proceedings of the 2002 ASME IMECE. PDF of the paper. (350 kB PDF)

Borenstein, J., Gerrish, N., White, R., Curie, M., and Fitzgerald, E. "Silicon germanium epitaxy: a new material for MEMS", in Proceedings of the MRS, vol. 657, 2000, pp. EE7.4.1-EE7.4.6. PDF of the paper.

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