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2012
PhD Dissertations
- Liu, S. "Cochlear Properties and Micromachined Hair-like Shear Sensors", Ph.D. Thesis, Tufts University, February 2012. PDF of the thesis (12 MB).
Journal Papers
Conference Papers
- White, R.D., Krause, J., De Jong, R., Holup, G., Gallman, J., and Moeller, M. "MEMS Microphone Array on a Chip for Turbulent Boundary Layer Measurements" at the AIAA Aerospace Sciences Meeting, ASM 2012, Nashville, TN, Jan 8-12, 2012. PDF of the paper.
- Aryanpur, R. and White, R.D. "Multi-link Piezoelectric Structure for Vibration Energy Harvesting" at SPIE Smart Structures and Materials, San Diego, CA, March 11-15, 2012.
2011
PhD Dissertations
- Krause, J. S. "Micromachined Microphone Array on a Chip for Turbulent Boundary Layer Measurements", Ph.D. Thesis, Tufts University, August 2011. PDF of the thesis (39 MB).
Journal Papers
- Doody, C., Lemmerhirt, D., Cheng, X., Collin, R., White,
R. D. "Modeling and Characterization of CMOS-Fabricated Capacitive
Micromachined Ultrasonic Transducers", Journal of
Microelectromechanical Systems, v. 20, n. 1, pp. 104-118, 2011. PDF of the paper.
- White, R. D. , Mueller, A. J., Shin, M., Gauthier, D.,
Manno, V. P., and Rogers, C. B. "Measurement of Microscale Shear
Forces during Chemical Mechanical Planarization", Journal of the
Electrochemical Society, 158 (10), pp. H1041-H1051, 2011. PDF of the
paper.
- White, R. D., Gray, C., Mandelup, E., Amsden, J. J., Kaplan, D. L., and Omenetto, F. G., "Rapid Nano Impact Printing of Silk Biopolymer Thin Films", Journal of Micromechanics and Microengineering, 21 (115014), 2011. PDF of the
paper.
- Shin, M., Gerratt A. P., Metallo, C., Brindle, A., Kierstead,
B. P., and White, R. D. "Characterization of a Micromachined
Parylene Based Thermal C-Shape Actuator", Journal of Micromechanics and
Microengineering, 21 (095028), 2011.PDF of the
paper.
- Saunders, F., Golden, E., White, R. D., and Rife, J. "Experimental
Verification of Soft-Robot Gaits Evolved Using a Lumped Dynamic
Model", Robotica, 29 (6) pp. 823-830, 2011. PDF of the paper.
- Metallo, C., White, R. D. , and Trimmer, B. A., "Flexible
parylene-based micro-electrode arrays for high resolution EMG
recordings in freely moving small animals", Journal of Neuroscience
Methods, 195 (2011), pp. 176-184. PDF of the
paper.
- Gray, C., Rogers, C. B., Manno, V. P., and White, R. D. "Modeling
of Dual Emission Laser Induced Fluorescence for Slurry Thickness
Measurements in CMP", Experiments in Fluids, 51(1), pp. 281-293, 2011. PDF of the
paper.
Conference Papers
- White, R.D., Krause, J., Liu, S., Zhao, Z., Gallman, J., and Moeller, M. "Array-on-a-Chip Pressure and Shear Stress Sensors for Boundary Layer Characterization" at the AIAA Aerospace Sciences Meeting, ASM 2011, Orlando, FL, Jan 3-7, 2011.
- Minchul Shin, Joshua Krause, Paul DeBitteto, and Robert White, "Capacitive Micromachined Ultrasound Doppler Velocity Sensor" presented at the 161st Meeting of the Acoustical Society of America, Seattle, 23-27 May 2011.
- Joshua Krause, Alfram Bright, Mark Moeller, Judith Gallman, and
Robert White "Micromachined Reconfigurable Microphone Array for Wind
Tunnel Testing" presented at the 161st Meeting of the Acoustical
Society of America, Seattle, 23-27 May 2011. Best student paper in
engineering acoustics, Spring 2011
- Liu, S. and White, R. D., "Determining the Orthotropic
Properties of Gerbil Basilar Membrane from Space Constant
Measurements" in the Proceedings of the 11th International Mechanics of Hearing Workshop, C. Shera and E. Olson, eds., July 2011. LINK
- Tam, B., Fakhraee, A., and White, R. D., "Coiled
Hydromechanical Scale Model of the Inner Ear" in the Proceedings of
the 11th International Mechanics of Hearing Workshop, C. Shera and
E. Olson, eds., July 2011. LINK
- White, R. D., Zhao, Z., Shin, M., Krause, J.S. and Liu, S. "Nickel on Glass Acoustic Microsystems", presented at the 162nd meeting of the Acoustical Society of America, San Diego, October 31 - November 4, 2011. Invited talk.
- Burns, J. R., Krause, J. S., and White, R. D. "Low Profile Packaging for MEMS Aeroacoustic Sensors" in the Proceedings of the Materials Research Society, MRS Fall Meeting, 2011. PDF
- Zhao, Z., Gallman, J., and White, R. D. "Micromachined Nickel Floating Element Shear Stress Sensor Array", in Electrochemical Society Transactions, vol. 41, 2011.PDF
2010
Journal Papers
- Amsden, J., Domachuk,,P., Gopinath, A., White, R.D., Dal Negro, L., Kaplan, D. and Omenetto, F. "Rapid Nanoimprinting of Silk Fibroin Films for Biophotonic Applications", Advanced Materials, vol. 22, 2010. PDF of the
paper.
- Vlahakis, J., Manno, V. P., Rogers, C. B., and White, R. "Stick-Slip Transitions in Chemical Mechanical Planarization", Electrochemical and Solid-State Letters, 13(6), H206-H208, 2010. PDF of the
paper.
Conference Papers
- Krause, J. S., White, R. D. , Moeller, M. J., Gallman, J. M.,
Holup, G. and deJong, R. "MEMS Pressure Sensor Array for
Aeroacoustic Analysis of the Turbulent Boundary Layer" in Proceedings
of the 48th AIAA Aerospace Sciences Meeting, Orlando, Florida, January
4-7, 2010. PDF of
the paper.
- Joshua Krause and Robert D. White, "MEMS Microphone Array on a Chip" presented at the 159th Meeting
of the Acoustical Society of America, Baltimore, Maryland, 19-23 April
2010. Best student paper in
engineering acoustics, Spring 2010.
- Shuangqin Liu and Robert D. White, "Influence of Hair Bundle
Configuration on Biomimetic Hair Sensor Sensitivity" (poster)
presented at the 159th Meeting of the Acoustical Society of America,
Baltimore, Maryland, 19-23 April 2010.
2009
Patents
- R. White, A. Mueller, C. Rogers, V. Manno, D. Gauthier, and
H. Stone U.S. Patent: "Shear Sensors and the Uses Thereof", Serial
Number PCT/US2009/039415 filed 4/3/09. Claims the benefit of U.S. provisional
application Serial No. 61/042,132 filed April 3, 2008.
- R. White and J. Krause, U.S. Patent: "MEMS Microphone Array on a Chip", Serial Number PCT/US2009/045289 ,filed May 27, 2009. Claims the benefit of U.S. provisional application Serial Number 61/056,291 filed 5/27/08.
- R. White, U.S. Provisional Patent: "Nanopad Technology : Micromachined Force Sensor Arrays for Realtime Measurement of Pad Sealing Forces" U.S. Provisional Application No.: 61/286,436, Filed December 15, 2009.
Journal Articles
- Vlahakis, J., Rogers, C., Manno, V., White, R., Moinpur, M.,
Hooper, D., and Anjur, S., "Synchronous, In Situ Measurements in
Chemical Mechanical Planarization", Journal of the Electrochemical
Society, 156 (10), H794-H802, 2009. PDF of the
paper.
- Mueller, N., Rogers, C. Manno, V., White, R. and Moinpour, M.,
"In-Situ Investigation of Slurry Flow Fields during CMP", Journal of the Electrochemical Society, 156 (12), H908-H912, 2009. PDF of the
paper.
Conference Papers
- Krause, J., White, R., Moeller, M., and deJong R., "MEMS Pressure
Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary
Layer" in the Proceedings of the AIAA, AIAA Infotech, Seattle, WA,
April 6-9, 2009. PDF of the
paper.
- Shin, M., Vlahakis, J., Manno, V. P., Rogers, C. B., Paul, E., Moinpour, M., Hooper, D., and White, R. D. "In Situ Metrology for Glass and Copper CMP" in Proceedings of the International Conference on Planarization/CMP Technology, ICPT 2009, Fukuoka, Japan, Nov. 19-21, 2009. PDF of the
paper.
2008
Patents
- R. White and J. Krause, U.S. Provisional Patent: "MEMS Microphone Array on a Chip", Serial Number 61/056,291 filed 5/27/08.
- R. White, A. Mueller, C. Rogers, V. Manno, and D. Gauthier, U.S. Provisional Patent: "Shear Sensors and the Uses Thereof", Serial Number 61/042,132 filed 4/3/08.
Journal Articles
- Cheng, L., White, R. D. , and Grosh, K. "Three Dimensional Viscous
Finite Element Formulation For Acoustic Fluid Structure Interaction"
Computer Methods in Applied Mechanics and Engineering, 197,
pp. 4160-4172, 2008. PDF of the paper.
- Galbraith, C. ,White, R. D. , Cheng, L., Grosh, K. and Rebeiz,
G. M. "Cochlea-Based RF Channelizing Filters", IEEE Transactions on
Circuits and Systems I: Regular Papers, 55 (4), pp. 969-979,
2008. PDF of the
paper.
- Liu, S., and White, R. D. "Orthotropic material properties of the
gerbil basilar membrane", Journal of the Acoustical Society of
America, 123 (4), pp. 2160-2171, 2008. PDF of the
paper.
- Gray, C., White, R. D. , Manno, V. P., and Rogers, C. B. "Simulated
Effects of Measurement Noise on Contact Measurements between Rough and
Smooth Surfaces", Tribology Letters, 29 (3), pp. 185-192, 2008. PDF of the
paper.
- White, R. D. , Cheng, L., and Grosh, K. "Microfabrication of
Coupled Fluid-Structure Systems with Applications in Acoustic
Sensing", Sensors and Actuators A-Physical, 141 (2), 2008, pp. 288-298.
PDF of the paper.
Conference Papers
- Thompson, J., Tepolt, G. Racz, L., Rogers, C. B., Manno, V. P., and White, R. D. "A Method for Die Thickness Reduction to sub-35 5m" in the Proceedings of the Materials Research Society, MRS Fall Meeting, December 2008.
- White, R., Vlahakis, J., Gray, C., Manno, V., Braun, N., Gauthier, D., Mueller, A., Rogers, C. and Moinpour, M. "In Situ Characterization of the Mechanical Aspects of CMP" in the Proceedings of the International Conference on Planarization/CMP Technology 2008, Hsinchu, Taiwan, November 10-12, 2008. PDF of the
paper.
- C.B. Doody, R. D. White, J.S. Wadhwa, and D.F. Lemmerhirt, "Characterization and Modeling of Capacitive Micromachined Ultrasound Transducers for Diagnostic Ultrasound" in Proceedings of the ASME IMECE, Boston, MA, October 31-November 6, 2008. PDF of the
paper.
- J. S. Krause, R. D. White, M. J. Moeller, J. M. Gallman, and R. deJong, "MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer" in Proceedings of the ASME IMECE, Boston, MA, October 31-November 6, 2008. PDF of the
paper.
- S. Liu, D. A. Gauthier, E. Mandelup, and R. D. White, "Experimental Investigation of a Hydromechanical Scale Model of the Gerbil Cochlea" in Proceedings of the ASME IMECE, Boston, MA, October 31-November 6, 2008. PDF of the
paper.
- D. Gauthier, A. Mueller, R. White, V. Manno, C. Rogers, S. Anjur
and M. Moinpour, "Micromachined Force Sensors for Characterization of
Chemical Mechanical Polishing" in Proceedings of Nanotech 2008,
Boston, MA, June 1-6, 2008. PDF of the
paper.
- J.S. Krause, R.D. White, M.J. Moeller, J.M. Gallman and R. De Jong,
"MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent
Boundary Layer on an Airplane Fuselage" in Proceedings of Nanotech
2008, Boston, MA, June 1-6, 2008. PDF of the paper.
- P. D. Fallon, A.P. Gerratt, B.P. Kierstead, and R.D. White, "Shape
Memory Alloy and Elastomer Composite MEMS Actuators" in Proceedings of
Nanotech 2008, Boston, MA, June 1-6, 2008. PDF of the paper.
- Meghan Kate, Greg Bettencourt, James Marquis, Aaron Gerratt, Peter
Fallon, Brian Kierstead, Robert White and Barry Trimmer, "SoftBot : A
soft-material flexible robot based on caterpillar biomechanics" in
Adaptive Movement in Animals and Machines, AMAM 2008, Cleveland, OH,
June 1-6, 2008. PDF of the paper.
- C.B. Doody, J.S. Wadhwa, D.F. Lemmerhirt, and R.D. White,
"Characterization and Modeling of Capacitive Micromachined Ultrasound
Transducers for Diagnostic Ultrasound" in Proceedings of Nanotech
2008, Boston, MA, June 1-6, 2008. PDF of the
paper.
- Hughes, M.F., Sanayei, M., Moore, J.A., Zapfe, J.A., and White,
R.D., "Experimental Validation of Building Vibration Propagation Using
a Four Story Laboratory Model," in the Proceedings of the ASCE,
Structures Congress 2008, Vancouver, Canada, April 24-26, 2008. PDF of the
paper.
- D. Gauthier, A. Mueller, R. D. White, V. Manno, C. Rogers,
D. Hooper, S. Anjur, M. Moinpour, "Micromachined Lateral Force Sensors
for Characterization of Microscale Surface Forces During Chemical
Mechanical Polishing." in the Proceedings of the Materials Research
Society, MRS Spring Meeting, March 24-28, 2008. PDF of the
paper.
2007
Patents
- R. White and K. Grosh, U.S. Patent Pending: "Trapped Fluid Microsystems For Acoustic Sensing", Serial No. 11/656,849 filed January 23,2007. Claims the benefit of U.S. provisional application Serial No. 60/761,166 filed January 23, 2006.
Journal Articles
- Martin, M. J., White, R. D. , Kurabayashi, K., and Boyd, I. D.,
"Fabrication of beam structures with micro-scale cross-sections and
meso-scale spans," Journal of Micromechanics and Microengineering, 17
(12), pp. 2516-2521, 2007. PDF of the
paper.
Conference Papers
- N. Braun, C. Gray, A. Mueller, J. Vlahakis, D. Gauthier,
V. P. Manno, C. Rogers, R. White, S. Anjur, M. Moinpour. "In-Situ
Investigation of Wafer-Slurry-Pad Interactions during CMP" in the
Proceedings of the International Conference on Planarization/CMP
Technology, Dresden, Germany, October 25-27, 2007. PDF of the
paper.
- Tsioris, K., White, R. D. , Kaplan, D., and Wong, P. "The Effect of Hydrophobic Patterning on Micromolding of Aqueous-Derived Silk Structures" in the Proceedings of the Material Research Society, MRS Fall Meeting, November 26-30, 2007. PDF of the
paper.
- White, R. D. , Littrell, R., and Grosh, K. "Copying the Cochlea: Micromachined Biomimetic Acoustic Sensors" 6th International Workshop on Structural Health Monitoring, September 11-13, 2007, Palo Alto, CA. PDF of the paper.
- Mueller, A. White, R. D. , Manno, V., Rogers, C., Barns, C. E.,
Anjur, S., and Moinpour, M. "Micromachined Shear Stress Sensors for
Characterization of Surface Forces During Chemical Mechanical
Polishing" in Proceedings of the Materials Research Society, Vol. 991,
Symposium C, Advances and Challenges in Chemical Mechanical
Planarization, 2007. PDF of the paper.
- Gray, C., Rogers, C. Manno, V., White, R., Moinpour, M., Anjur
S. "Determining Pad-Wafer Contact using Dual Emission Laser Induced
Fluorescence", in Proceedings of the Materials Research Society,
Vol. 991, Symposium C, Advances and Challenges in Chemical Mechanical
Planarization, 2007. PDF of the paper.
2006
Conference Papers
- Stone, N., Kaiser, K., and White, R. D. "Autotuning of a PID
controller for an active vibration suppression device for the
treatment of Essential Tremor", Proceedings of the 2006 American
Society of Mechanical Engineering International Mechanical Engineering
Congress and Exposition, IMECE2006. PDF of the paper.
- Mueller, A., and White, R. D. "Residual stress variation in
polysilicon thin films", in Proceedings of the 2006 American Society
of Mechanical Engineering International Mechanical Engineering
Congress and Exposition, IMECE2006. PDF of the paper.
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White, R. D. and Grosh, K. "Fully Micromachined Lifesize
Cochlear Model" in Auditory Mechanisms: Processes and Models,
A. L. Nuttall, ed., World Scientific, 2006. PDF of the paper.
2005 and before
Journal Papers
- White,
R. D., and Grosh, K. "Microengineered hydromechanical cochlear model"
Proceedings of the National Academy of Sciences 102 (5),
pp. 1296-1301, 2005. PDF of
the paper.
Conference Papers
-
White, R. D. and Grosh, K. "Fluid-Structure Traveling Wave Filters Based
on the Mammalian Cochlea" in Proceedings of the uTAS 2005 Conference,
Ninth International Conference on Miniaturized Systems for Chemistry
and Life Science, K. F. Jensen, J. Han, D. J. Harrison, and
J. Voldman, Eds., pp. 666-668. PDF of the paper.
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Galbraith, C., White, R. D. , Grosh, K., and Rebeiz, G. M. "A mammalian
cochlea-based RF channelizer filter" in Microwave Symposium Digest,
2005 IEEE MTT-S International, 12-17 June 2005 pp. 1935-1938. PDF of
the paper.
- White,
R. D., Cheng, L., and Grosh, K. "Capacitively sensed micromachined
hydrophone with viscous fluid-structure coupling", Proceedings of the
SPIE, Photonics West: MOEMS-MEMS Micro & Nanofabrication San Jose,
vol. 5718, 121 (2005) pp. 121-132. PDF of the
paper.
- White, R. D. and Grosh, K. "A micromachined cochlear-like acoustic
sensor", in Proceedings of the SPIE, vol. 4700, 2002 pp. 89-100. PDF of the paper. (680 kB
PDF)
- White, R. D. and Grosh, K. "Design and characterization of a MEMS
piezoresistive cochlear-like acoustics sensor", in Proceedings of the
2002 ASME IMECE. PDF
of the paper. (350 kB PDF)
- Borenstein,
J., Gerrish, N., White, R., Curie, M., and Fitzgerald, E. "Silicon
germanium epitaxy: a new material for MEMS", in Proceedings of the
MRS, vol. 657, 2000, pp. EE7.4.1-EE7.4.6. PDF of the paper.
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